NanoSIMS laboratory

Nano Secondary Ion Mass Spectrometer

PRL main campus

NanoSIMS is a unique ion microprobe working at high lateral/Spatial resolution. It is based on a coaxial optical design of the ion beam and the secondary ion extraction along with magnetic sector mass analyser and multicollection system.


  • High spatial resolution: (~50 nm for Cs+ and ~200 nm for O- ) Capable of analyzing sub micrometre-size sample.
  • High mass resolution: Interferences can be resolved with MRP (m/Δm) = 10,000 to 15,000.
  • High Transmission: ~ 30 x IMS-4f, better precision.
  • Multi-isotope detection facility, saves sample analyses time. Less destructive technique: Few Å.